Cymer Laser


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The project scope included design services for a new 10,000 square foot clean room. DEC Engineers was the consulting mechanical engineer. The new clean room required extremely tight temperature, humidity, and pressure relationships. DEC Engineers worked with the mechanical contractor to develop Revit drawing to coordinate installation within an extremely tight construction schedule and limited ceiling space.

Design Features

  • New custom air handler
  • Rework existing air handler
  • Central steam system
  • Class 10,000 clean room environment
  • Refrigerant monitoring and exhaust
  • Expand existing central plant
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